Permanently bonded fluid channel nozzle plate fabrication

A method of fabricating a printhead comprising:

• providing a silicon wafer including a first surface and a second surface, the silicon wafer including a material property;
• providing a nozzle membrane layer on the first surface of the silicon wafer;
• sizing the silicon wafer to a thickness ranging from 10 to 250 microns;
• defining a plurality of chambers on the second surface of the silicon wafer by depositing and patterning a mask on the second surface of the silicon wafer;
• forming the plurality of chambers in the silicon wafer by etching the portions of the silicon wafer that are exposed by the mask;
• and
• permanently bonding a second wafer to the second surface of the silicon wafer, the second wafer including a material property that is compatible with the material property of the silicon wafer, the second wafer including a preformed fluid channel that is in fluid communication with the plurality of chambers of the silicon wafer after permanently bonding.