Radiation-sensitive composition, and compound
AssigneeJsr Corporation
InventorKen MARUYAMA
Life of this patent
Estimating the term…
Abstract
A radiation-sensitive composition includes a compound represented by a formula (1), and a polymer having a structural unit that includes an acid-labile group. In the formula (1), R1 represents a group having a polar group; n is an integer of 1 to 4, wherein, in a case where R1 is present in a plurality of number, the plurality of R1s are identical or different, and optionally at least two R1s taken together represent a cyclic structure; A represents an alicyclic hydrocarbon group having a valency of (n+1); and M+ represents a monovalent onium cation.
Claims9
A radiation-sensitive composition comprising:
- a compound represented by a formula (1), and
- a polymer having a structural unit that includes an acid-labile group:
- wherein, in the formula (1), R1 represents a group having a polar group;
- n is an integer of 1 to 4, wherein, in a case where R1 is present in a plurality of number, the plurality of R1s are identical or different, and optionally at least two R1s taken together represent a cyclic structure;
- A represents an alicyclic hydrocarbon group having a valency of (n+1);
- and M+ represents a monovalent onium cation.
A compound represented by a formula (1):
- Is wherein, in the formula (1), R1 represents a group having a polar group;
- n is an integer of 1 to 4, wherein, in a case where R1 is present in a plurality of number, the plurality of R1s are identical or different, and optionally at least two R1s taken together represent a cyclic structure;
- A represents an alicyclic hydrocarbon group having a valency of (n+1);
- and M+ represents a monovalent onium cation.
Dependencies are inferred from the claim text.