Tunable resistance coatings
AssigneeUchicago Argonne, LLC
InventorsJeffrey W. Elam, Anil U. Mane
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Abstract
A method and article of manufacture of intermixed tunable resistance composite materials containing at least one of W:Al2O3, Mo:Al2O3 or M:Al2O3 where M is a conducting compound containing either W or Mo. A conducting material and an insulating material are deposited by such methods as ALD or CVD to construct composites with intermixed materials which do not have structure or properties like their bulk counterparts.
Claims17
A method of tunably forming a film of selected resistance and thickness comprising:
- selecting a starting conducting material selected from the group of W, Mo, and their conducting compounds, and selecting a starting insulating material;
- performing a deposition of a prescribed amount of the starting conducting material;
- performing a deposition of a prescribed amount of the starting insulating material;
- repeating these two steps a prescribed number of times to achieve a film with the selected resistance and thickness for an end product.
An article of manufacture, comprising a film of composite materials including at least two materials selected from the group of an insulating material and a conducting material selected from the group of Mo, W and their conducting compounds, and with a pre-selected tuned electrical resistance associated with a percentage of depositions of each of the insulating and the conducting materials and a pre-selected thickness associated with the total number of depositions.
Dependencies are inferred from the claim text.