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AssigneeAdvanced Technology Materials, Inc.
InventorsTianniu Chen, Steven Bilodeau, Chimin Sheu, Mutsumi Nakanishi, Masahiro Matsuoka, Fumio Nakayama, Peng Zhang, Michael B. Korzenski, Emanuel I. Cooper, Kate Veccharelli, Makonnen Payne
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Methods of reducing the capillary forces experienced by fragile high aspect ratio structures during drying to substantially prevent damage to said high aspect ratio structures during drying. They include modifying the surface of the high aspect ratio structures such that the forces are sufficiently minimized and as such less than 10% of the high aspect ratio features will have bent or collapsed during drying of the structure having said features thereon.
A method of modifying a surface of a high aspect ratio feature, said method comprising:
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An article of manufacture comprising an additive composition and a modified surface, wherein the additive composition comprises at least one surfactant, at least one organic solvent, and optionally at least one co-surfactant, optionally at least one defoaming agent, optionally at least one buffering agent, and optionally at least one stability agent.
An article of manufacture comprising a modified high aspect ratio surface, said modified surface comprising adsorbed surfactant compounds and a rinse solution, wherein said composition in contact with the modified surface has a contact angle in a range from about 70 degrees to about 110 degrees, and wherein the modified high aspect ratio surface comprises a material selected from the group consisting of titanium nitride, amorphous carbon, tantalum nitrides, tungsten nitride, cobalt silicides, nickel silicides, polysilicon, silicon nitride, ruthenium-containing compounds selected from the group consisting of ruthenium, ruthenium oxide, ruthenium nitride, other ruthenium-containing compounds, and any combination thereof.
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Dependencies are inferred from the claim text.