Classifier readiness and maintenance in automatic defect classification
AssigneeApplied Materials Israel Ltd.
InventorsIdan Kaizerman, Vladimir Shlain, Efrat Rozenman
Life of this patent
Estimating the term…
Loading patent…
AssigneeApplied Materials Israel Ltd.
InventorsIdan Kaizerman, Vladimir Shlain, Efrat Rozenman
Estimating the term…
A method for classification includes receiving inspection data associated with a plurality of defects found in one or more samples and receiving one or more benchmark classification comprising a class for each of the plurality of defects. a readiness criterion for one or more of the classes is evaluated based on the one or more benchmark classification results, wherein the readiness criterion comprises for each class, a suitability of the inspection data for training an automatic defect classifier for the class. A portion of the inspection data is selected corresponding to one or more defects associated with one or more classes that satisfy the readiness criterion. One or more automatic classifiers are trained for the one or more classes that satisfy the readiness criterion using the selected portion of the inspection data.
A method for classification, comprising:
An apparatus comprising:
A non-transitory computer readable storage medium having instructions that, when executed by a processing device, cause the processing device to perform operations comprising:
Dependencies are inferred from the claim text.