Measuring apparatus

A measuring apparatus comprising:

• a connection part which is connected with a beam line of a soft X ray source,
• a mechanism which light-collects a spot size of soft X rays incident from the beam line into a micro beam,
• a low vacuum vessel which is connected with the beam line,
• a means for producing a low vacuum state of the low vacuum vessel,
• a means for dividing an inside of the low vacuum vessel into two or more measurement chambers,
• a means for dividing soft X rays such that each X ray is irradiated on each of the insides of the divided low vacuum vessels,
• a specimen stage which mounts a specimen on each of the insides of the divided low vacuum vessels, and
• a mechanism of detecting a light element which is B, C, N, O, F, Na, Mg, Al, Si, P, and S, or a transition metal element which is Mn, Fe, Co, Ni, Cu, and Zn in the specimen by irradiating the divided soft X ray on each of the specimens.