Silicon-metal composite micromechanical component and method of manufacturing the same
AssigneeNivarox-FAR S.A.
InventorsJean-Charles Fiaccabrino, Marco Verardo, Thierry Conus, Jean-Philippe Thiebaud, Jean-Bernard Peters
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Abstract
The invention relates to a method (1) of manufacturing a silicon-metal composite micromechanical component (51) combining DRIE and LIGA processes. The invention also relates to a micromechanical component (51) including a layer wherein one part (53) is made of silicon and another part (41) of metal so as to form a composite micromechanical component (51). The invention concerns the field of timepiece movements.
Claims20
1-32. (canceled)
A silicon-metal composite micromechanical component including a part formed in a silicon layer, wherein said silicon part includes a toothing for forming a wheel or a pinion and, at least over one portion of the thickness thereof, a metal part with a thickness of more than 6 microns for insulating the silicon part from destructive stress.
Dependencies are inferred from the claim text.