Thin film piezoelectric element and manufacturing method thereof, micro-actuator, head gimbal assembly and disk drive unit with the same

A manufacturing method of a thin film piezoelectric element, comprising steps of:

• providing a substrate;
• depositing a bottom electrode layer on the substrate;
• and
• depositing a piezoelectric layer comprising a first piezoelectric layer and a second piezoelectric layer on the bottom electrode layer, and a top electrode layer on the piezoelectric layer;
• wherein the first piezoelectric layer and the second piezoelectric layer have different phase structures.

A disk drive unit, comprising:

• a head gimbal assembly;
• a drive arm to connect with the head gimbal assembly;
• disks;
• and
• a spindle motor to spin the disks;
• wherein the head gimbal assembly comprises a suspension, a slider supported by the suspension, and a thin film piezoelectric element formed on the suspension for actuating the slider, wherein the thin film piezoelectric element comprises:
• a substrate;
• and
• a piezoelectric thin film stack formed on the substrate, and the piezoelectric thin film stack comprising a top electrode layer, a bottom electrode layer and a piezoelectric layer sandwiched between the top electrode layer and the bottom electrode layer, wherein the piezoelectric layer comprises a first piezoelectric layer and a second piezoelectric layer whose compositions have different phase structures.