In-plane resonator structures for evanescent-mode electromagnetic-wave cavity resonators

A device comprising:

• an evanescent-mode electromagnetic-wave cavity resonator comprising:
• a lower cavity means having an inner cavity surface and a mating means around the periphery of the inner cavity surface of the lower cavity means, the inner cavity surface of the lower cavity means having a conductive means deposited or patterned thereon;
• an upper cavity means having an inner cavity surface and a mating means around the periphery of the inner cavity surface of the upper cavity means, the inner cavity surface of the upper cavity means having a conductive means deposited or patterned thereon, the upper cavity means and the lower cavity means forming a volume therebetween, the volume being operable to support one or more evanescent electromagnetic wave modes;
• and
• an in-plane lithographically-defined resonating means having a portion that is located at least partially within the volume so as to support the one or more evanescent electromagnetic wave modes, the in-plane lithographically-defined resonating means being formed of a conductive material or having a conductive means deposited or patterned thereon, an upper mating means of the in-plane lithographically-defined resonating means being mated with, bonded with, or otherwise connected with the mating means of the upper cavity means, a lower mating means of the in-plane lithographically-defined resonating means being mated with, bonded with, or otherwise connected with the mating means of the lower cavity means, a distal surface of the in-plane lithographically-defined resonating means being separated or electrically insulated from the closest surface thereto by a gap distance, a resonant electromagnetic wave mode of the cavity resonating means being dependent at least partially upon the gap distance.