Optical mems scanning micro-mirror with anti-speckle cover

A method for reducing speckle in a micro-projection system adapted for projecting light on a projection surface, comprising:

• providing a light with at least one coherent light source;
• directing light from the light source to the projection surface;
• providing a scanning micro-mirror for deviating light from said light source so as to scan a projected image onto said projecting surface;
• providing a layer of deformable transparent material arranged to be traversed by said light beam;
• and
• providing a piezo-actuator assembly cooperating with said transparent material so that when actuated, the piezo-actuator assembly causes micro-deformation of the transparent material so as to reduce speckle.

A method for manufacturing an optical MEMS scanning micro-mirror, comprising:

• providing a MEMS micro-mirror for deflecting a light beam;
• providing a transparent substrate arranged to be traversed by said light beam;
• deposing a piezo-actuator assembly on one side of the substrate, said assembly forming a substantially central cavity;
• and
• providing said cavity with a layer of deformable transparent material.