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AssigneeHitachi High-Technologies Corporation
InventorsMasato Kamio, Masashi Watanabe, Yoshinobu Hoshino, Shigeru Kawamata
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A charged particle beam device of the present invention has a signal processing function of acquiring a secondary signal obtained when a charged particle beam is caused to scan at a low speed not subjected to a band limitation of an electrical signal path, and a secondary signal obtained when a charged particle beam is caused to scan at a high speed subjected to the band limitation of the electrical signal path, calculating a degradation function (H−1(s)) between the plurality of secondary signals, and using an inverse function thereof as a correction filter; and a function of updating a parameter of the correction filter to an optimal value as needed or at given timing. Accordingly, the charged particle beam device can perform optimum image restoration even when a detector or an amplifier circuit that constitutes the electrical signal path degrades with time.
A charged particle beam device comprising:
The charged particle beam device according to claim wherein the means for updating the correction filter has a function of updating all correction filters in a batch.
A method for correcting a detected signal of a charged particle beam device, comprising the processes of:
Dependencies are inferred from the claim text.