Liquid droplet discharge head, method of manufacturing liquid droplet discharge head, and liquid droplet discharge device
AssigneeSeiko Epson Corporation
InventorsJunichi TAKEUCHI, Kiyoshi MIYAZAWA
Life of this patent
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Abstract
In a liquid droplet discharge head, a first groove-shaped cavity is formed on a cavity plate, a second groove-shaped cavity is formed on a nozzle plate in addition to nozzle holes, when bonding the cavity plate and the nozzle plate to each other, the first groove-shaped cavity and the second groove-shaped cavity overlap to form a pressure chamber.
Claims10
A method of manufacturing a liquid droplet discharge head that includes a nozzle plate having nozzle holes, a cavity plate joined to the nozzle plate, and a pressure chamber communicating with the nozzle holes, the method comprising:
- forming a first groove-shaped cavity on a substrate for the cavity plate to obtain the cavity plate;
- forming the nozzle holes on a substrate for the nozzle plate and forming a second groove-shaped cavity communicating with the nozzle holes on a main surface of the substrate for the nozzle plate to obtain the nozzle plate;
- and
- stacking the first groove-shaped cavity and the second groove-shaped cavity and bonding the nozzle plate and the cavity plate to each other to form the pressure chamber.
A liquid droplet discharge head comprising:
- a cavity plate having a first cavity as a through hole;
- and
- a nozzle plate having nozzle holes formed on a first surface and a second cavity formed on a second surface of an opposite side to the first surface, the nozzle holes communicating with the second cavity,
- wherein the nozzle plate and the cavity plate are bonded to each other on the second surface of the nozzle plate, and
- the nozzle hole, the first cavity and the second cavity communicate with one another.
A method of manufacturing a liquid droplet discharge head, comprising:
- forming a first cavity as a through hole on a first substrate to obtain a cavity plate;
- forming nozzle holes on a first surface of a second substrate, and forming a second cavity on a second surface of an opposite side to the first surface of the second substrate to obtain a nozzle plate, the nozzle holes communicating with the second cavity;
- and
- bonding the second surface of the nozzle plate and the cavity plate to each other.
Dependencies are inferred from the claim text.