US 2013/0278359 A1Published application

Two- and three-substrate level processes for producing evanescent mode electromagnetic wave cavity resonators

AssigneeQUALCOMM MEMS Technologies, Inc.

InventorsPhilip Jason Stephanou, Sang-June Park, Ravindra V. Shenoy

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Abstract

This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a method includes providing a first substrate and a second substrate. In some implementations, the first substrate includes a cavity ceiling, an array of dielectric spacers, and an assembly platform arranged adjacent the array of dielectric spacers opposite the cavity ceiling surface. The assembly platform includes a plurality of post tops. In some implementations, the second substrate has an array of cavities and an array of resonator posts. In some implementations, the method includes mating the first substrate with the second substrate, connecting the post tops with the posts to form an array that includes a plurality of evanescent-mode electromagnetic wave cavity resonators, wherein at least a statically-defined magnitude of a gap distance between the distal surface of each post top and the cavity ceiling is defined by the dielectric spacers.

Claims44

Dependent claims

A method comprising:

providing a first substrate having a mating side that includes:
a cavity ceiling surface;
an array of dielectric spacers arranged adjacent the cavity ceiling surface;
and
an assembly platform arranged adjacent the array of dielectric spacers opposite the cavity ceiling surface, the assembly platform including a plurality of post tops, each post top having a distal surface adjacent the dielectric spacers and a mating surface opposite the distal surface, the assembly platform being formed of a conductive material or having a conductive layer deposited or patterned thereon;
providing a second substrate having a mating side that includes:
an array of cavities, each cavity including an inner cavity surface having a conductive layer deposited or patterned thereon;
and
an array of resonator posts, each post being formed within or arranged within a corresponding one of the cavities, each post being formed of a conductive material or having a conductive layer deposited or patterned thereon, each post further including a mating surface at a distal end of the post;
mating the mating side of the first substrate with the mating side of the second substrate;
and
connecting the mating surfaces of the post tops with the mating surfaces of the posts to form an array that includes a plurality of evanescent-mode electromagnetic wave cavity resonators.

9 more elements

A method comprising:

providing a first substrate having a mating side that includes:
a cavity ceiling surface;
an array of dielectric spacers arranged adjacent the cavity ceiling surface;
and
an assembly platform arranged adjacent the array of dielectric spacers opposite the cavity ceiling surface, the assembly platform including a plurality of post tops, each post top having a distal surface adjacent the dielectric spacers and a mating surface opposite the distal surface, the assembly platform being formed of a conductive material or having a conductive layer deposited or patterned thereon;
providing a second substrate that includes an array of cavities, each cavity including an inner cavity surface having a conductive layer deposited or patterned thereon, the array further including a first mating surface arranged around a first periphery of each cavity on a first mating side of the second substrate, the array further including a second mating surface arranged around a second periphery of each cavity on a second mating side of the second substrate opposite the first mating side;
and
providing a third substrate having a mating side that includes an array of resonator posts, each post being formed of a conductive material or having a conductive layer deposited or patterned thereon, each post further including a mating surface at a distal end of the post;
mating the mating side of the third substrate with the second mating side of the second substrate such that each of the posts is positioned centrally within a corresponding one of the cavities of the second substrate;
mating the mating side of the first substrate with the first mating side of the second substrate;
and
connecting the mating surfaces of the post tops with the mating surfaces of the posts to form an array that includes a plurality of evanescent-mode electromagnetic wave cavity resonators.

9 more elements

An arrangement comprising:

a first substrate having a mating side that includes:
a cavity ceiling surface;
an array of dielectric spacers arranged adjacent the cavity ceiling surface;
and
an assembly platform arranged adjacent the array of dielectric spacers opposite the cavity ceiling surface, the assembly platform including a plurality of post tops, each post top having a distal surface adjacent the dielectric spacers and a mating surface opposite the distal surface, the assembly platform being formed of a conductive material or having a conductive layer deposited or patterned thereon;
and
a second substrate having a mating side that includes:
an array of cavities, each cavity including an inner cavity surface having a conductive layer deposited or patterned thereon;
and
an array of resonator posts, each post being formed within or arranged within a corresponding one of the cavities, each post being formed of a conductive material or having a conductive layer deposited or patterned thereon, each post further including a mating surface at a distal end of the post;
wherein the mating surfaces of the post tops are connected with the mating surfaces of the posts to form an array that includes a plurality of evanescent-mode electromagnetic wave cavity resonators.

8 more elements

An arrangement comprising:

a first substrate having a mating side that includes:
a cavity ceiling surface;
an array of dielectric spacers arranged adjacent the cavity ceiling surface;
and
an assembly platform arranged adjacent the array of dielectric spacers opposite the cavity ceiling surface, the assembly platform including a plurality of post tops, each post top having a distal surface adjacent the dielectric spacers and a mating surface opposite the distal surface, the assembly platform being formed of a conductive material or having a conductive layer deposited or patterned thereon;
a second substrate that includes an array of cavities, each cavity including an inner cavity surface having a conductive layer deposited or patterned thereon, the array further including a first mating surface arranged around a first periphery of each cavity on a first mating side of the second substrate, the array further including a second mating surface arranged around a second periphery of each cavity on a second mating side of the second substrate opposite the first mating side;
and
a third substrate having a mating side that includes an array of resonator posts, each post being centrally arranged with a corresponding cavity, each post being formed of a conductive material or having a conductive layer deposited or patterned thereon, each post further including a mating surface at a distal end of the post;
wherein the mating surfaces of the post tops are connected with the mating surfaces of the posts to form an array that includes a plurality of evanescent-mode electromagnetic wave cavity resonators.

6 more elements

Dependencies are inferred from the claim text.