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US 2013/0278356 A1Published application
Wide-band acoustically coupled thin-film baw filter
AssigneeTeknologian tutkimuskeskus VTT Oy
InventorsJohanna Meltaus, Tuomas Pensala
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Abstract
The invention relates to an acoustically coupled thin-film BAW filter, comprising a piezoelectric layer, an input-port on the piezoelectric layer changing electrical signal into an acoustic wave (SAW, BAW), and an output-port on the piezoelectric layer changing acoustic signal into electrical signal. In accordance with the invention the ports include electrodes positioned close to each other, and the filter is designed to operate in first order thickness-extensional TE1 mode.
Claims18
An acoustically coupled thin-film Bulk Acoustic Wave (BAW) filter, comprising;
- a piezoelectric layer,
- an input-port on the piezoelectric layer changing electrical signal into an acoustic wave, and
- an output-port on the piezoelectric layer changing acoustic signal into electrical signal,
- wherein
- the ports include electrodes positioned such that acoustic coupling is achieved,
- the filter is capable of operating in the first order thickness-extensional TE1 mode, and
- wherein the mass loading by the top electrode (plateback) is such that the frequency difference between the k=0 frequency of the electrode region's TE1 mode and the outside region's TS2 mode is relatively small.
4 more elements
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Dependencies are inferred from the claim text.