Apparatus and method for active voltage compensation of electrostatic discharge of a substrate
OwnerBernhard G. MUELLERinventor
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Abstract
A voltage compensation assembly adapted for apparatus having a prober for contacting the electronic elements on a substrate is described. The voltage compensation assembly includes a controller connected to the prober and adapted for active voltage compensation, and a voltage measuring unit connected to the controller and for measuring a voltage on the substrate.
Claims20
A voltage compensation assembly adapted for a system having a prober configured to contact electronic elements on a substrate;
- the voltage compensation assembly comprising:
- a controller connected to the prober and adapted for active voltage compensation to the electronic elements via the prober;
- a voltage measuring unit connected to the controller and configured to measure a static voltage on the substrate, wherein the controller is configured to provide, via the prober, a voltage to the electronic elements in order to actively compensate the voltage on the substrate measured by the voltage measuring unit;
- and
- wherein the voltage measuring unit is configured to measure electronic field flux lines of the static voltage for measuring the static voltage of the substrate.
An apparatus for testing or processing a substrate with electronic elements formed thereon, comprising:
- a chamber;
- a substrate support configured to support the substrate within the chamber;
- a prober positioned to contact the substrate disposed on the substrate support;
- and
- a voltage compensation assembly, wherein the voltage compensation assembly comprises:
- a controller connected to the prober and adapted for active voltage compensation to the electronic elements via the prober;
- and
- a voltage measuring unit connected to the controller and configured to measure a static voltage on the substrate, wherein the controller is configured to provide, via the prober, a voltage to the electronic elements in order to actively compensate the voltage on the substrate measured by the voltage measuring unit, and wherein the voltage measuring unit is configured to measure electronic field flux lines of the static voltage for measuring the static voltage of the substrate.
A method for active voltage compensation in a chamber having a substrate support configured to support a substrate with electronic elements formed thereon, and a prober configured to contact the electronic elements, the method comprising:
- loading the substrate in the chamber, wherein the substrate and the substrate support are positioned distant from each other at a predetermined distance before the substrate and the substrate support approach each other;
- disposing the substrate on the substrate support in a supporting position;
- contacting the electronic elements with the prober;
- testing or processing the substrate;
- providing a compensation voltage to the electronic elements via the prober;
- breaking the contact of the prober and the electronic elements;
- moving at least one of the substrate and the substrate support to increase the distance of the substrate and the substrate support after the compensation voltage is provided, wherein contacting the electronic elements with the prober comprises contacting the electronic elements with a plurality of needles of the prober, and wherein providing an active voltage compensation to the electronic elements occurs via the plurality of needles of the prober.
Dependencies are inferred from the claim text.