Antenna structure and plasma generating device

An antenna structure for plasma generation, comprising:

• four induction antennas which have the same structure, are connected in parallel with one another, and are disposed to be overlapped,
• wherein the induction antennas comprises:
• An antenna structure for plasma generation, comprising:
• two induction antennas which have the same structure, are connected in parallel with one another, and are disposed to be overlapped,
• wherein the induction antennas 101a comprises:
• an external upper section 110a disposed on a first quadrant of a first layer 141;
• an internal upper section 112a connected to the external upper section 110a and disposed on a second quadrant of a second layer 142 disposed at an upper part of the first layer;
• an internal lower section 122a connected to the internal upper section 112a and disposed on a third quadrant of a third layer 143 disposed at a lower part of the second layer;
• and
• an external lower section 120a connected to the internal lower section 112a and disposed on a fourth quadrant of a fourth layer 144 disposed at a lower part of the first layer 141,
• wherein one end of the external upper section 110a is supplied with an RF power, and the other end of the external lower section 120a is grounded.

An antenna structure for plasma generation, comprising:

• two induction antennas which have the same structure, are connected in parallel with one another, and are disposed to be overlapped,
• wherein the induction antennas comprises:
• an external upper section disposed over a first quadrant and a second quadrant of a first layer;
• an internal upper section connected to the external upper section and disposed over a third quadrant and a fourth quadrant of the first layer;
• an internal lower section connected to the internal upper section and disposed over a first quadrant and a second quadrant of a second layer disposed at a lower part of the first layer;
• and
• an external lower section connected to the internal lower section and disposed over a third quadrant and a fourth quadrant of the second layer,
• wherein one end of the external upper section is supplied with an RF power, and the other end of the external lower section is grounded.

A plasma generating device comprising:

• The plasma generating device is
• a vacuum container;
• a dielectric unit disposed at a part of the vacuum container;
• and
• an antenna structure for plasma generation disposed on the dielectric unit comprises,
• wherein the antenna structure includes four induction antennas which have the same structure, are connected in parallel with one another, and are disposed to be overlapped,
• wherein the induction antennas comprises:
• an external upper section disposed on a first quadrant of a first layer;
• an internal upper section connected to the external upper section and disposed on a second quadrant of the first layer;
• an internal lower section connected to the internal upper section and disposed on a third quadrant of a second layer disposed at a lower part of the first layer;
• and
• an external lower section connected to the internal lower section and disposed on a fourth quadrant of the second layer, and
• wherein one ends of the external upper sections are supplied with an RF power and the other ends of the external lower sections are grounded.