Piezoelectric micromachined ultrasound transducer with patterned electrodes
AssigneesMasdar Institute of Science and Technology, Massachusetts Institute of Technology
InventorsFiras Sammoura, Katherine Marie Smyth, Sang-Gook Kim
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Abstract
A piezoelectric micro-machined ultrasonic transducer (PMUT) uses multiple electrodes, e.g., in a radial pattern for a disc, to improve performance. The multiple electrodes may be differentially driven to operate the PMUT in d31 mode (that is, with an applied electrical field perpendicular to the piezoelectrically-induced strain) where deflection relative to input voltage is increased and in-plane stresses are reduce, thus improving overall performance.
Claims23
A device formed of a clamped, micromachined structure, the device comprising:
- a piezoelectric material having a top surface and a bottom surface;
- a first group of electrodes forming a pattern on the top surface of the first piezoelectric material;
- and
- a second group of electrodes forming the pattern on the bottom surface of the first piezoelectric material.
Dependencies are inferred from the claim text.