Mems shock cushion spring systems and methods

A device comprising:

• a fixed frame;
• a platform that is moveable relative to the fixed frame;
• and
• an actuator interconnecting the fixed frame and the platform, wherein the actuator is adapted to move the platform in at least one degree of freedom, and wherein the actuator comprises:
• a first frame comprising a spine, wherein the spine comprises a spine body and a spine tip;
• a second frame coupled to the first frame and comprising a shock stop, wherein the shock stop comprises a shock stop surface in proximity to the spine tip;
• and
• a shock cushion spring fixed relative to the spine tip and situated substantially between the spine tip and the shock stop surface, wherein the shock stop surface is adapted to limit a range of relative motion of the first and second frames, and wherein the shock cushion spring is adapted to protect the spine tip from contact with the shock stop surface.

A method comprising:

• forming a spine in a first frame of a microelectromechanical (MEMS) device, wherein the spine comprises a spine body and a spine tip;
• forming a shock stop in a second frame of the MEMS device, wherein the shock stop comprises a shock stop surface in proximity to the spine tip;
• and
• forming a shock cushion spring fixed relative to the spine tip, wherein the shock cushion spring is adapted to protect the spine tip from contact with the shock stop surface.