Bipolar junction transistors with reduced base-collector junction capacitance
AssigneeInternational Business Machines Corporation
InventorsPeng Cheng, David L. Harame, Robert K. Leidy, Qizhi Liu
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AssigneeInternational Business Machines Corporation
InventorsPeng Cheng, David L. Harame, Robert K. Leidy, Qizhi Liu
Estimating the term…
Methods for fabricating a device structure such as a bipolar junction transistor, device structures for a bipolar junction transistor, and design structures for a bipolar junction transistor. The device structure includes a collector region formed in a substrate, an intrinsic base coextensive with the collector region, an emitter coupled with the intrinsic base, a first isolation region surrounding the collector region, and a second isolation region formed at least partially within the collector region. The first isolation region has a first sidewall and the second isolation region having a second sidewall peripherally inside the first sidewall. A portion of the collector region is disposed between the first sidewall of the first isolation region and the second sidewall of the second isolation region.
A method of fabricating a bipolar junction transistor, the method comprising:
13-27. (canceled)
Dependencies are inferred from the claim text.