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US 2013/0277799 A1Published application
Integrated Circuit Capacitor and Method
AssigneeMacronix International Co., Ltd.
InventorsShih-Hung Chen, Kuang-Yeu Hsieh
Life of this patent
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Abstract
An example of a capacitor includes a series of ridges and trenches and an interconnect region on the integrated circuit substrate. The series of ridges and trenches and the interconnect region have a capacitor foundation surface with a serpentine cross-sectional shape on the series of ridges and trenches. Electrical conductors are electrically connected to the electrode layers from the interconnect region for access to the electrode layers of the capacitor assembly.
Claims20
A capacitor comprising:
- a series of ridges and trenches and an interconnect region on a substrate, the series of ridges and trenches and the interconnect region having a capacitor foundation surface with a serpentine cross-sectional shape on the series of ridges and trenches;
- a serpentine, stacked plate capacitor assembly, comprising at least two electrically conductive electrode layers and dielectric layers separating the electrode layers, at the capacitor foundation surface creating a stack of one or more capacitors;
- and
- electrical conductors electrically connected to the electrode layers from the interconnect region for access to the electrode layers of the capacitor assembly.
1 more element
A method for forming a capacitor comprising:
- forming a series of ridges separated by trenches on a substrate, and an interconnect region on the substrate adjacent to the series of ridges and trenches, the series of ridges and trenches and the interconnect region having a capacitor foundation surface;
- the ridges forming step carried out so that the capacitor foundation surface has convex and concave structures defining a serpentine cross-sectional shape;
- forming alternating layers of electrically conductive electrode layers and dielectric layers separating the electrode layers on the capacitor foundation surface to create a stack of at least two serpentine plate capacitors;
- and
- electrically connecting electrical conductors to the electrode layers at the interconnect region for access to the electrode layers.
2 more elements
Dependencies are inferred from the claim text.