Flash memory devices and methods for fabricating same
AssigneeSpansion LLC
InventorsNing Cheng, Fred Cheung, Ashot Melik-Martirosian, Kyunghoon Min, Michael Brennan, Hiroyuki Kinoshita
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AssigneeSpansion LLC
InventorsNing Cheng, Fred Cheung, Ashot Melik-Martirosian, Kyunghoon Min, Michael Brennan, Hiroyuki Kinoshita
Estimating the term…
Flash memory devices and methods for fabricating the same are provided. In accordance with an exemplary embodiment of the invention, a method for fabricating a memory device comprises the steps of fabricating a first gate stack and a second gate stack overlying a substrate. A trench is etched into the substrate between the first gate stack and the second gate stack and a first impurity doped region is formed within the substrate underlying the trench. The trench is filled at least partially with a conductive material.
-20. (canceled)
A memory device comprising:
A memory device comprising:
Dependencies are inferred from the claim text.