Method for Separating and Recovering Silicon from Silicon Sludge

Abstract

Disclosed is a method for selectively separating and recovering silicon from waste silicon sludge generated during a semiconductor manufacturing process. With the method for separating and recovering silicon from the silicon sludge, oil components, iron, silicon carbide that are included in the silicon sludge may be removed and silicon may be selectively separated and recovered. In addition, silicon may be efficiently recovered without injection of an additive for precipitating a specific component or without a separate device such as a magnetic separator, or the like, for removing iron.

Dependencies are inferred from the claim text.