Coating apparatus having a hipims power source
AssigneeHauzer Techno Coating BV
InventorsFrank Papa, Roel Tietema, Anthonie Kaland
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Abstract
A coating apparatus having a vacuum chamber, a plurality of cathodes arranged therein and also a HIPIMS power source, characterized in that in addition to at least one coating cathode which can be operated with the HIPIMS power source a plurality of etching cathodes is provided which are smaller in area in comparison to the coating cathode, with the etching cathodes being connectable in a predetermined or predeterminable sequence to the HIPIMS power source.
Claims9
1-7. (canceled)
A coating apparatus (10) having a vacuum chamber (14), a plurality of cathodes (16, 16A, 16B, 16C, 16D) arranged therein and also a HIPIMS power source (18) wherein, in addition to at least one coating cathode (16) which can be operated with the HIPIMS power source a plurality of etching cathodes (16A, 16B, 16C, 16D) is provided which are smaller in area in comparison to the coating cathode, with the etching cathodes being connectable in a predetermined or predeterminable sequence to the HIPIMS power source (18).
Dependencies are inferred from the claim text.