Deposition device, and collection device
AssigneeSharp Kabushiki Kaisha
InventorsTohru Sonoda, Shinichi Kawato, Satoshi Inoue, Satoshi Hashimoto
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AssigneeSharp Kabushiki Kaisha
InventorsTohru Sonoda, Shinichi Kawato, Satoshi Inoue, Satoshi Hashimoto
Estimating the term…
A Film (7) is provided on at least a part of a surface of each of a vapor deposition preventing plate (3) and a shutter (4) of a vacuum chamber (5) on which surface vapor deposition particles are vapor-deposited, the film (7) being provided so as to be peeled off from the each of the vapor deposition preventing plate (3) and the shutter (4), and the film being made of a material differing in at least one of a melting point, a sublimation point, solubility in a given solvent, microbial biodegradability, and photodegradability from a material of which a vapor-deposited film that is formed on the film (7) is made.
A vapor deposition device comprising:
A collection device comprising:
10-22. (canceled)
Dependencies are inferred from the claim text.