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US 2013/0273239 A1Published application
Nozzle design for organic vapor jet printing
AssigneeUniversal Display Corporation
InventorsSiddharth Harikrishna Mohan, Paul E. Burrows
Life of this patent
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Abstract
Nozzle designs which have been found to be effective in governing overspray in OVJP are provided. Aspects of the invention have been found to be effective in reducing or avoiding sudden pressure drops at the end of the nozzle close to the substrate, and may be advantageously employed in obtaining, for example, greater consistency between the nozzle outlet diameter and the deposited pattern width.
Claims40
A method of depositing an organic material, comprising:
- introducing a vapor including the organic material into a nozzle via an inlet;
- ejecting the vapor from an outlet at a distal end of the nozzle, the outlet having a cross sectional area A1;
- after the ejecting, depositing the organic material on a substrate to form at least part of an organic emitting or detecting area,
- wherein, the vapor is passed through a portion of the nozzle between the inlet and the outlet at an axial distance L1 from the outlet, the portion of the nozzle having a cross sectional area A2,
- wherein A1/A2 is approximately 16 or greater.
2 more elements
An organic material depositing device, comprising:
- an organic material supply;
- a carrier gas supply;
- a nozzle in fluid communication with the organic material supply and the carrier gas supply, said nozzle including:
- an inlet;
- an outlet at a distal end of the nozzle including a cross sectional area A1 and a diameter D1;
- and
- a portion between the inlet and the outlet at an axial distance L1 from the outlet, the portion of the nozzle including a cross sectional area A2 and a diameter D2,
- wherein A2 is less than A1,
- L1/D2 is greater than 2, and
- the device is configured such that a vapor mixture of the carrier gas and the organic material is passed through the nozzle, and the organic material deposited on a substrate after exiting the outlet.
7 more elements
A method of depositing an organic material, comprising:
- introducing a vapor including the organic material into a nozzle via an inlet;
- ejecting the vapor from an outlet at a distal end of the nozzle, the outlet having a cross sectional area A1 and a diameter D1;
- after the ejecting, depositing the organic material on a substrate to form at least part of an organic emitting or detecting area,
- wherein, the vapor is passed through a portion of the nozzle between the inlet and the outlet at an axial distance L1 from the outlet, the portion of the nozzle having a cross sectional area A2 and a diameter D2,
- wherein L1/D2 is greater than 2.
2 more elements
Dependencies are inferred from the claim text.