Micromachined monolithic 6-axis inertial sensor

A single proof-mass, micromachined, monolithic, 6-axis inertial sensor apparatus, comprising:

• a main proof-mass section suspended about a single, central anchor, the main proof-mass section including radial portions extending outward towards the edge of the 6-axis inertial sensor;
• a pair of x-axis proof-mass sections coupled to the main proof-mass section using multi-function flexure bearings and coupled to each other using an anti-phase flexure bearing;
• a pair of y-axis proof-mass sections coupled to multiple radial portions of the main proof-mass section using elongated flexure bearings;
• a central suspension system configured to suspend the 6-axis inertial sensor from the single, central anchor;
• and
• a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 6-axis inertial sensor about a z-axis normal to the x-y plane at a drive frequency.

A method, comprising:

• suspending a single proof-mass of a 6-axis inertial sensor about a single, central anchor coupled to a stationary layer using central suspension, the main proof-mass section including a radial portion extending outward towards the edge of the 6-axis inertial sensor;
• suspending first and second x-axis proof-mass sections from the main proof-mass section using multi-function flexure bearings;
• anchoring a stationary drive electrode to the stationary layer;
• coupling a moveable electrode to the stationary electrode;
• oscillating the single proof-mass at a drive frequency using the stationary drive electrode, the moveable electrode, and the central suspension.