Polishing liquid and method for polishing substrate using the polishing liquid
AssigneeHitachi Chemical Company, Ltd.
InventorsMunehiro Oota, Takaaki Tanaka, Toshio Takizawa, Shigeru Yoshikawa, Takaaki Matsumoto, Takahiro Yoshikawa, Takashi Shinoda
Life of this patent
Estimating the term…