Method and apparatus for reducing package warpage
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMeng-Tse CHEN, Hui-Min HUANG, Chun-Cheng LIN, Chih-Chun CHIU, Ming-Da CHENG, Chung-Shi LIU
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMeng-Tse CHEN, Hui-Min HUANG, Chun-Cheng LIN, Chih-Chun CHIU, Ming-Da CHENG, Chung-Shi LIU
Estimating the term…
Embodiments of mechanisms for flattening a packaged structure are provided. The mechanisms involve a flattening apparatus and the utilization of protection layer(s) between the packaged structure and the surface(s) of the flattening apparatus. The protection layer(s) is made of a soft and non-sticking material to allow protecting exposed fragile elements of the packaged structure and easy separation after processing. The embodiments of flattening process involve flattening the warped packaged structure by pressure under elevated processing temperature. Processing under elevated temperature allows the package structure to be flattened within a reasonable processing time.
A method of flattening a packaged structure, comprising:
A method of flattening a packaged structure, comprising:
An apparatus for flattening a packaged structure, comprising:
Dependencies are inferred from the claim text.