Mems optical device
OwnerTiansheng ZHOUinventor
Life of this patent
Estimating the term…
Abstract
A micro-electro-mechanical-system (MEMS) micromirror array has an array of micromirrors on a support structure. Each micromirror is pivotally attached to the support structure by a resilient structure. The resilient structure defines a pivot axis. There is an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis. Each electrostatic actuator comprises a first part carried by the support structure, and a second part carried by the corresponding micromirror. An electrostatic sink is mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation.
Claims13
1-25. (canceled)
A MEMS optical device, comprising:
- an optical element mounted on a support structure by a resilient structure, the resilient structure permitting movement along an axis that is perpendicular to the support structure and resisting movement in any direction perpendicular to the axis;
- an electrostatic combdrive actuator having a first part mounted on the support structure, and a second part mounted on the optical element, the first part and the second part providing an actuating force to the optical element to move the optical element along the axis.
A MEMS optical device, comprising:
- an optical element mounted on a support structure by a resilient structure, the resilient structure permitting movement along an axis that is perpendicular to the support structure and resisting movement in any direction perpendicular to the axis,
- wherein the optical element is optically reflective.
Dependencies are inferred from the claim text.