Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and methods of manufacturing liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
AssigneeSeiko Epson Corporation
InventorsKoji OHASHI, Yasuhiro ITAYAMA, Kenichi KUROKAWA, Eiji OSAWA, Motohisa NOGUCHI
Life of this patent
Estimating the term…
Abstract
Provided is a liquid ejecting head including a piezoelectric element which includes a piezoelectric layer and electrodes provided on the piezoelectric layer on an upper portion of a zirconium oxide layer, in which the zirconium oxide layer is formed of granular crystal grains.
Claims9
A liquid ejecting head comprising a piezoelectric element which includes a piezoelectric layer and electrodes provided on the piezoelectric layer on a upper portion of a zirconium oxide layer,
- wherein the zirconium oxide layer is formed of granular crystal grains.
A piezoelectric element which is provided on an upper portion of a zirconium oxide layer and includes a piezoelectric layer and electrodes provided on the piezoelectric layer,
- wherein the zirconium oxide layer is formed of granular crystal grains.
A method of manufacturing a liquid ejecting head including a piezoelectric element which includes a piezoelectric layer and electrodes provided on the piezoelectric layer on an upper portion of a zirconium oxide layer, the method comprising:
- applying a precursor solution and crystallizing a coated film when forming the zirconium oxide layer.
A method of manufacturing a piezoelectric element including a piezoelectric layer and electrodes provided on the piezoelectric layer on an upper portion of a zirconium oxide layer, the method comprising:
- applying a precursor solution and crystallizing a coated film when forming the zirconium oxide layer.
Dependencies are inferred from the claim text.