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US 2013/0256889 A1Published application
Substrate and semiconductor device
AssigneeOlympus Corporation
InventorsYoshiaki Takemoto, Yuichi Gomi, Chihiro Migita, Hiroshi Kikuchi
Life of this patent
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Abstract
A substrate includes a base member having a predetermined thickness, and an electrode array provided in one surface in a thickness direction of the base member and having a plurality of electrodes arranged two-dimensionally in a plan view, and the electrode array includes a central portion and an incremental region provided around the central portion in the planar view and is formed so that a height of the electrodes in the incremental region gradually increase as approaching toward the central portion.
Claims12
A substrate comprising
- a base member having a predetermined thickness, and an electrode array provided in one surface in a thickness direction of the base member and having a plurality of electrodes arranged two-dimensionally in a planar view,
- wherein the electrode array includes a central portion and an incremental region provided around the central portion in the planar view and is formed so that a height of the electrodes in the incremental region gradually increase as approaching toward the central portion.
Dependencies are inferred from the claim text.