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US 2013/0256785 A1Published application
Semiconductor device, module and system each including the same, and method for manufacturing the semiconductor device
AssigneeSK hynix Inc.
InventorIn Seung CHUNG
Life of this patent
Estimating the term…
Abstract
A barrier for preventing a bridge between adjacent storage node contacts is formed below a bit line located between the bit line contacts, so that a contact region between each storage node contact and an active region is increased in size. The semiconductor device includes a device isolation film defining an active region, a bit line contact coupling the active region to a bit line, and a barrier formed below the bit line located between the bit line contacts.
Claims16
A semiconductor device comprising:
- a device isolation film defining an active region;
- a bit line contact coupling the active region to a bit line;
- and
- a barrier formed below the bit line located between the bit line contacts.
1 more element
A semiconductor device comprising:
- a device isolation film defining an active region;
- an interlayer insulation film formed over the active region and the device isolation film;
- a first and a second storage node contacts formed in the interlayer insulation film and coupled to first and second ends of the active region, respectively;
- and
- a barrier provided below the bit line and between the first storage node contact and the second storage node contact.
2 more elements
16-23. (canceled)
Dependencies are inferred from the claim text.