Ion sources, systems and methods
AssigneeCarl Zeiss Microscopy GmbH
InventorsRichard Comunale, Alexander Groholski, John A. Notte, IV, Randall G. Percival, Billy W. Ward
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AssigneeCarl Zeiss Microscopy GmbH
InventorsRichard Comunale, Alexander Groholski, John A. Notte, IV, Randall G. Percival, Billy W. Ward
Estimating the term…
Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
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Dependencies are inferred from the claim text.