Heat treatment system, heat treatment method, and non-transitory computer-readable recording medium

A heat treatment method, comprising:

• storing a heat treatment condition in accordance with a process content, the heat treatment condition comprising a temperature inside a processing chamber heated by a heating unit configured to heat an inside of the processing chamber receiving a plurality of objects to be processed;
• storing a model showing a relationship between a temperature change inside the processing chamber and a power change of the heating unit;
• receiving information on a change of the temperature inside the processing chamber, the temperature inside the processing chamber being stored in storing the heat treatment condition;
• calculating a power of the heating unit required at a changed temperature inside the processing chamber based on the changed temperature received in receiving the information on the change of the temperature inside the processing chamber and the model stored in storing of the model showing the relationship;
• and
• determining whether the power of the heating unit calculated in the calculating of power is saturated.

A non-transitory computer-readable recording medium that causes a computer to perform as:

• a heat treatment condition storing unit configured to store a heat treatment condition in accordance with a process content, the heat treatment condition comprising a temperature inside a processing chamber heated by a heating unit configured to heat an inside of the processing chamber receiving a plurality of objects to be processed;
• a power change model storing unit configured to store a model showing a relationship between a temperature change inside the processing chamber and a power change of the heating unit;
• a changed temperature receiving unit configured to receive information on a change of the temperature inside the processing chamber, the temperature inside the processing chamber being stored in the heat treatment condition storing unit;
• a power calculation unit configured to calculate power of the heating unit required at a changed temperature inside the processing chamber based on the changed temperature received by the changed temperature receiving unit and the model stored in the power change model storing unit;
• and
• a determining unit configured to determine whether the power of the heating unit calculated by the power calculation unit is saturated.