Method for Forming Circuit on Flexible Laminate Substrate
AssigneeJX Nippon Mining & Metals Corporation
InventorsKazuhiko Sakaguchi, Hajime Inazumi
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AssigneeJX Nippon Mining & Metals Corporation
InventorsKazuhiko Sakaguchi, Hajime Inazumi
Estimating the term…
A method for forming a circuit on a flexible laminate substrate, wherein when a circuit is formed using an adhesive-free flexible laminate having a polyimide film that serves as a flexible laminate substrate at least one surface of which is plasma-treated, a tie-coat layer A formed on the polyimide film, a metal conductor layer B formed on the tie-coat layer, and a nickel-copper alloy layer as an alloy layer C on the metal conductor layer, a photoresist is applied on the alloy layer C formed on the metal conductor layer, the photoresist is exposed and developed, the sputter layer C, the metal conductor layer B, and the alloy layer C are removed by etching using the same etching solution so as to retain a circuit portion, and the photoresist of the circuit portion is further removed so as to form the circuit.
A method for forming a circuit on a flexible laminate substrate, wherein when a circuit is formed using an adhesive-free flexible laminate having a polyimide film that serves as a flexible laminate substrate at least one surface of which is plasma-treated, a tie-coat layer A formed on the polyimide film, a metal conductor layer B formed on the tie-coat layer, and a nickel-copper alloy layer containing nickel in an amount of 60 mass % or greater as an alloy layer C on the metal conductor layer, a photoresist is applied on the alloy layer C formed on the metal conductor layer, the photoresist is exposed and developed, the alloy layer C, the metal conductor layer B, and the tie-coat layer A are removed by etching using the same etching solution to retain a circuit portion, and the photoresist of the circuit portion is further removed so as to form the circuit.
(canceled)
A flexible laminate substrate comprising a polyimide film, a tie-coat layer A formed on the polyimide film, a metal conductor layer B on the tie-coat layer A, and an alloy layer C composed of a nickel-copper alloy containing nickel in an amount of 60 mass % or greater on the metal conductor layer B.
Dependencies are inferred from the claim text.