Back to results
US 2013/0255382 A1Published application
Physical quantity sensor and electronic apparatus
AssigneeSeiko Epson Corporation
InventorSatoru TANAKA
Life of this patent
Estimating the term…
Abstract
A physical quantity sensor includes: a fixed portion; a fixed electrode portion; and a movable body that includes a support portion disposed around the fixed portion in plan view, a movable electrode portion supported by the support portion, extending along a first axis, and arranged to face the fixed electrode portion, and a coupling portion coupling the fixed portion with the support portion, and is displaceable along a second axis crossing the first axis.
Claims9
A physical quantity sensor comprising:
- a fixed portion;
- a fixed electrode portion;
- and
- a movable body that includes a support portion disposed around the fixed portion in plan view, a movable electrode portion supported by the support portion, extending along a first axis, and arranged to face the fixed electrode portion, and a coupling portion coupling the fixed portion with the support portion, and is displaceable along a second axis crossing the first axis.
1 more element
Dependencies are inferred from the claim text.