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US 2013/0255379 A1Published application
Vibrating element, sensor unit, electronic apparatus, and method for manufacturing vibrating element
AssigneeSeiko Epson Corporation
InventorsKeiji NAKAGAWA, Ryuta NISHIZAWA
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Abstract
An vibrating gyro device includes a base, drive vibrating arms extending from one end of the base, and detection vibrating arms extending from the other end of the base that faces away from the one end, and an adjustment film is provided on each of the drive vibrating arms in an area close to the base.
Claims20
An vibrating element comprising:
- a base;
- and
- a drive vibrating arm and a detection vibrating arm extending from the base,
- wherein an adjustment film is provided on the drive vibrating arm in an area close to the base.
1 more element
A method for manufacturing an vibrating element, the method comprising:
- providing an vibrating body including a base and a drive vibrating arm and a detection vibrating arm extending from the base;
- increasing the mass of the drive vibrating arm on the front end side thereof or decreasing the mass of the drive vibrating arm on the front end side thereof;
- and
- forming an adjustment film on the drive vibrating arm in an area close to the base or forming an adjustment film on the drive vibrating arm in an area close to the base and removing at least part of the adjustment film.
1 more element
Dependencies are inferred from the claim text.