Inertial sensor and measuring method for measuring angular velocity using the same

A method for measuring angular velocity, comprising:

• simultaneously applying first driving voltage that is AC driving voltage and second driving voltage having a phase difference of 90° from the first driving voltage to driving electrodes by a driving control unit;
• applying the first driving voltage to an X-axis driving unit and applying the second driving voltage to a Y-axis driving unit;
• sensing, by a mechanical sensor unit, vibrations of a mass body in X-axis and Y-axis directions by the X-axis driving unit and the Y-axis driving unit;
• sensing the vibration in the X-axis direction sensed by the mechanical sensor unit to allow a first sensor unit to sense Y-axis or Z-axis angular velocity, and sensing the vibration in the Y-axis direction by the mechanical sensor unit to allow a second sensor unit to sense the X-axis or Z-axis angular velocity;
• and
• extracting the Y-axis and Z-axis angular velocities by the first sensor unit by demodulating the signals sensed by the first sensor unit and the second sensor unit and outputting angular velocity signals of each axis by an output unit by extracting the X-axis and Z-axis angular velocities by the second sensor unit.