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US 2013/0255076 A1Published application
Methods of and factories for thin-film battery manufacturing
AssigneeApplied Materials, Inc.
InventorsByung-Sung Kwak, Stefan Bangert, Dieter Haas, Omkaram Nalamasu
Life of this patent
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Abstract
Methods of and factories for thin-film battery manufacturing are described. A method includes operations for fabricating a thin-film battery. A factory includes one or more tool sets for fabricating a thin-film battery.
Claims11
A factory layout for lithium-based thin-film battery manufacturing, the factory layout comprising:
- a first process tool for depositing active layers, wherein the first process tool is an in-line process tool;
- and
- a second process tool for depositing metal or semiconductor layers.
Dependencies are inferred from the claim text.