Method and apparatus for morphological analysis

A method of analysis of a structure, the method comprising, for each of a plurality of target areas of the structure:

• irradiating the target area of the structure with a first beam of light;
• detecting the amplitude of said first beam of light after interaction with the target area, the amplitude detected as a function of wavelength;
• transforming said detected amplitude to the optical thickness domain, said transforming comprising, for each wave number of the detected light, performing the equation (1+R)/(1−R), wherein R represents said detected amplitude;
• determining morphological information of the target area responsive to said transforming;
• and
• outputting said determined morphological information,
• wherein each target area comprises a particular area of at least the surface layer of the structure.

A control unit arranged to analyze light reflected off each of a plurality of target areas of a structure, each target area comprising a particular area of at least the surface layer of the structure, the amplitude of the light reflected off each target area detected by a detector arranged to output to said control unit information regarding the detected amplitude as a function of wavelength, the control unit comprising:

• an irradiating control functionality arranged, for each of a plurality of target areas of the structure, to control a target focusing functionality such that the target area is irradiated by light;
• a transform functionality arranged to transform the detected amplitude to the optical thickness domain, said transform comprising, for each wave number of the detected light, the equation (1+R)/(1−R), wherein R represents the amplitude of the detected light;
• and
• a determining functionality arranged to determine morphological information of the target area responsive to said transform and further arranged to output said determined morphological information.