Method for Depositing a Coating on a Substrate by Chemical Vapour Deposition
AssigneeOCAS Onderzoekscentrum voor Aanwending van Staal N.V.
InventorsSam Siau, Franz Horzenberger, Kurt De Sloover
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Abstract
The present invention is related to a method for depositing a coating on a substrate (2) by a flame-assisted chemical vapour deposition technique, wherein the substrate is exposed to a flame produced by a burner (1), while a flow of precursor elements is added to said flame, and wherein the substrate is subjected to a relative movement with respect to said burner wherein the flame is dragged out along a reaction zone (3) situated behind the burner, and wherein the relative speed of the substrate with respect to the flame is higher than 30 m/min.
Claims26
A method for depositing a coating on a substrate, said substrate consisting of or comprising on its surface a material other than silicone rubber, by a flame-assisted chemical vapour deposition technique, wherein the substrate is exposed to a flame produced by a burner, while a flow of precursor elements is added to said flame, and wherein the substrate is subjected to a relative movement with respect to said burner wherein the flame is dragged out along a reaction zone situated behind the burner, and wherein the relative speed of the substrate with respect to the flame is higher than 30 m/min, wherein no external cooling is done on the substrate during said relative movement.
(canceled)
Dependencies are inferred from the claim text.