Liquid Deposition Photolithography
AssigneeThe Regents of the University of Colorada, a body corporate
InventorsRobert R. McLeod, Adam Urness, Michael Cole, Eric Moore
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AssigneeThe Regents of the University of Colorada, a body corporate
InventorsRobert R. McLeod, Adam Urness, Michael Cole, Eric Moore
Estimating the term…
Systems and methods for liquid deposition photolithography are described. In particular, some embodiments relate to systems and methods for using photolithography to control the 2D structure of a thin layer of material (e.g., photopolymer) using various masks, projection optics and materials. In one or more embodiments, this thin layer can be manipulated by micro-fluidic techniques such that it can be formed, patterned and post-processed in a liquid environment, vastly simplifying the creation of multi-layer structures. Multiple layers are rapidly built up to create thick structures of possibly multiple materials that are currently challenging to fabricate by existing methods.
A method of liquid deposition photolithography comprising:
A system for liquid deposition photolithography comprising:
A method of liquid deposition photolithography comprising:
Dependencies are inferred from the claim text.