Polymer Compound, And Resist-Protecting Film Composition Including Same For A Liquid Immersion Exposure Process

A polymer compound comprising:

• 100 parts by mole of a repeating unit represented by Formula 1;
• 10 to 900 parts by mole of a repeating unit represented by Formula 2;
• and 10 to 900 parts by mole of a repeating unit represented by Formula 3, wherein the polymer compound has a weight average molecular weight of 1,000 to 100,000:
• wherein R1, R3, R4, R5, and R6 are each independently a hydrogen atom, a fluorine atom, or a substituted or unsubstituted C1-C20 alkyl group,
• R2 is a substituted or unsubstituted C1-C10 alkyl group or a substituted or unsubstituted C1-C10 cyclic alkyl group, wherein at least one hydrogen atom of the C1-C10 alkyl group and the C1-C10 cyclic alkyl group is substituted with a group represented by Formula a,
• R7 is a hydrogen atom or a substituted or unsubstituted C1-C25 alkyl group,
• wherein R8 is a hydrogen atom or a substituted or unsubstituted C1-C25 alkyl group, R9 is a single bond or a substituted or unsubstituted C1-C10 alkylene group, and * indicates a binding site.