Multi-Crystalline Silicon Ingot And Directional Solidification Furnace
AssigneeMemc Singapore, Pte. Ltd (Uen200614797D)
InventorsAditya Deshpande, Lee William Ferry, Benjamin Michael Meyer
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Abstract
An ingot having a mass of greater than about 1000 kg, a method of producing the ingot, and a directional solidification furnace for producing the ingot are disclosed.
Claims30
A multi-crystalline silicon ingot having a mass of at least about 1000 kg, the ingot having a dislocation density of less than about 100,000 counts per square centimeter.
A method for producing a multi-crystalline silicon ingot in a directional solidification furnace, the method comprising:
- charging a crucible in the furnace with poly-crystalline silicon, the mass of the poly-crystalline silicon being at least about 1000 kg;
- melting the poly-crystalline silicon;
- and
- cooling the molten silicon to form a multi-crystalline silicon ingot having a mass of at least about 1000 kg, the ingot having a dislocation density of less than about 100,000 counts per square centimeter.
A directional solidification furnace for producing a multi-crystalline silicon ingot having a mass of at least about 1000 kg and a dislocation density of less than about 100,000 counts per square centimeter, the furnace comprising:
- a crucible for containing a silicon charge;
- insulation disposed adjacent the crucible, the insulation movable between a first position where the insulation restricts the flow of heat away from the crucible and a second position where the insulation does not restrict the flow of heat away from the crucible;
- and
- one or more cooling plates positioned beneath the crucible.
A directional solidification furnace for producing a multi-crystalline silicon ingot have of at least about 1000 kg and a dislocation density of less than about 100,000 counts per square centimeter, the furnace comprising:
- a crucible for containing a silicon charge;
- and
- one or more cooling plates positioned beneath the crucible, the plates movable between a first position where the cooling plates are free from contact with a block positioned adjacent a bottom of the crucible and a second position where the plates are in contact with the block.
Dependencies are inferred from the claim text.