Esd protection element and esd protection device for use in an electrical circuit

An ESD protection element for use in an electrical circuit, comprising:

• a fully depleted silicon-on-insulator structure comprising:
• a first connection region having a first conductivity type,
• a second connection region having a second conductivity type, which is opposite to the first conductivity type,
• a first body region and a second body region, which are formed between the first connection region and the second connection region, the first body region having the second conductivity type and being formed adjacent to the first connection region, the second body region having the first conductivity type and being formed adjacent to the second connection region, and the first body region and the second body region having a dopant concentration that is lower than a dopant concentration of the first connection region and is lower than a dopant concentration of the second connection region,
• a diffusion region formed between the first body region and the second body region, the diffusion region having the first conductivity type or the second conductivity type, and the diffusion region having a dopant concentration that is substantially the same as at least one of the dopant concentration of the first connection region and the dopant concentration of the second connection region;
• and
• a gate region formed on or above the first body region or the second body region;
• and
• a gate control device, which is electrically coupled to the gate region and which is set up in such a way that an electrical potential applied to the gate region can be controlled, in such a way that the ESD protection element has a high electrical resistance during a first operating state of the electrical circuit, and that the ESD protection element has a lower electrical resistance during a second operating state of the electrical circuit, said second operating state being characterized by the occurrence of an ESD event.

An ESD protection element for use in an electrical circuit, comprising:

• a fin structure comprising:
• a first connection region having a first conductivity type,
• a second connection region having a second conductivity type, which is opposite to the first conductivity type,
• 2m (m∈N, m≧2) body regions formed alongside one another and between the first connection region and the second connection region, a first body region of the 2m body regions being formed adjacent to the first connection region, and a 2m-th body region of the 2m body regions being formed adjacent to the second connection region, wherein it holds true for all k (k∈N, 1≦k≦m) that the (2k−1)-th body region has the second conductivity type, and that the 2k-th body region has the first conductivity type, the 2m body regions having a dopant concentration that is lower than a dopant concentration of the first connection region and is lower than a dopant concentration of the second connection region,
• m−1 first diffusion regions having the second conductivity type and m−1 second diffusion regions having the first conductivity type, wherein it holds true for all k (k∈N, 1≦k≦m−1) that a first diffusion region and a second diffusion region are formed alongside one another between the 2k-th body region and the (2k+1)-th body region, the m−1 first diffusion regions and the m−1 second diffusion regions having a dopant concentration that is substantially the same as at least one of the dopant concentration of the first connection region and the dopant concentration of the second connection region;
• a respective gate region formed on or above each of the 2m body regions that has the first conductivity type, or a respective gate region formed on or above each of the 2m body regions that has the second conductivity type;
• and
• at least one gate control device electrically coupled to the gate regions and configured to control at least one electrical potential applied to the gate regions.

An ESD protection element for use in an electrical circuit, comprising:

• a fin structure comprising:
• a first connection region having a first conductivity type,
• a second connection region having a second conductivity type, which is opposite to the first conductivity type,
• 2m (m∈N, m≧2) body regions formed alongside one another and between the first connection region and the second connection region, in which case it holds true for all k (k∈N, 1≦k≦m) that the (2k−1)-th body region has the second conductivity type, and that the 2k-th body region has the first conductivity type, the first body region of the 2m body regions being formed adjacent to the first connection region, and the 2m-th body region of the 2m body regions being formed adjacent to the second connection region, the 2m body regions having a dopant concentration that is lower than a dopant concentration of the first connection region and is lower than a dopant concentration of the second connection region, m−1 first diffusion regions having the second conductivity type and m−1 second diffusion regions having the first conductivity type, wherein it holds true for all k (k∈N, 1≦k≦m−1) that a first diffusion region and a second diffusion region are formed alongside one another between the 2k-th body region and the (2k+1)-th body region, the m−1 first diffusion regions and the m−1 second diffusion regions having a dopant concentration that is substantially the same as at least one of the dopant concentration of the first connection region and the dopant concentration of the second connection region;
• a respective gate region formed on or above each of the 2m body regions that has the first conductivity type, and a respective gate region formed on or above each of the 2m body regions that has the second conductivity type;
• at least one gate control device electrically coupled to the gate regions and configured to control at least one electrical potential applied to the gate regions.

An electrical circuit, comprising:

• at least one electrical circuit element to be protected against an ESD event;
• and
• at least one ESD protection element connected in parallel with the at least electrical circuit element to be protected against an ESD event, the at least one ESD protection element comprising:
• a fin structure comprising:
• a first connection region having a first conductivity type,
• a second connection region having a second conductivity type, which is opposite to the first conductivity type,
• a first body region and a second body region, which are formed between the first connection region and the second connection region, the first body region having the second conductivity type and being formed adjacent to the first connection region, the second body region having the first conductivity type and being formed adjacent to the second connection region, and the first body region and the second body region having a dopant concentration that is lower than a dopant concentration of the first connection region and is lower than a dopant concentration of the second connection region,
• a diffusion region formed between the first body region and the second body region, the diffusion region having the first conductivity type or the second conductivity type, and the diffusion region having a dopant concentration that is substantially the same as at least one of the dopant concentration of the first connection region and the dopant concentration of the second connection region;
• and
• a gate region formed on or above the first body region or the second body region;
• and
• a gate control device electrically coupled to the gate region and configured to control at least one electrical potential applied to the gate region.