X-ray detector for electron microscope
AssigneeFEI Company
InventorsHanno Sebastian von Harrach, Bert Henning Freitag, Pleun Dona
Life of this patent
Estimating the term…
Abstract
Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
Claims23
1-35. (canceled)
An x-ray detector assembly for a transmission electron microscope including a lens having an upper pole piece and a lower pole piece, and a sample position between the upper pole piece and the lower pole piece, the x-ray detector assembly comprising:
- at least two x-ray detectors positioned between the upper pole piece and the lower pole piece of the transmission electron microscope;
- and
- a detector support for supporting the at least two x-ray detectors, the detector support being supported by the upper pole piece or the lower pole piece of the lens of the transmission electron microscope.
Dependencies are inferred from the claim text.