Solid-state image pickup device and method of manufacturing solid-state image pickup device

A method of manufacturing a solid-state image pickup device having a pixel array in which a plurality of pixels is arranged two-dimensionally,

• a formation of the pixels comprising:
• forming a plurality of photoelectric converting units;
• and
• forming a plurality of multilayer interference filters above the plurality of photoelectric converting units, each of which has a lower laminated structure, a control layer and an upper laminated structure,
• the formation of the plurality of multilayer interference filters including:
• alternately laminating first and second layers having different refractive indices from each other to form the plurality of lower laminated structures above the plurality of photoelectric converting units;
• coating a viscous solution containing a coating type silicon oxide on the plurality of lower laminated structures;
• three-dimensionally patterning a film of the coated viscous solution to form the plurality of control layers by using a template for a three-dimensional nanoimprint;
• and
• alternatively laminating the first layer and the second layer to form the plurality of upper laminated structures on the viscous solution subjected to the patterning,
• wherein in the formation of the plurality of control layers, the coated viscous solution is subjected to patterning three-dimensionally in such a manner that a second control layer in a second pixel of the plurality of pixels which is more distant from a center of the pixel array than a first pixel of the plurality of pixels is thicker than a first control layer in the first pixel.