Vibration suppression apparatus and vibration suppression method

A vibration suppression apparatus which includes a first object elastically supported on a base, a second object elastically supported on the first object, and a driving unit configured to be interposed between the base and the first object and drive the first object, and which suppresses a vibration of the second object, comprising:

• a first generation unit configured to generate a first signal which instructs a driving amount of the driving unit to reduce a deviation between a relative distance between the base and the first object, and a first reference distance;
• a second generation unit configured to generate a second signal which instructs a driving amount of the driving unit to reduce a deviation between a relative distance between the first object and the second object, and a second reference distance;
• and
• a control unit configured to control the first generation unit, the second generation unit, and the driving unit,
• wherein the control unit operates the first generation unit and controls the driving unit based on the first signal, and
• after the deviation between the relative distance between the base and the first object, and the first reference distance falls within an allowable range, the control unit operates the second generation unit and controls the driving unit based on the first signal and the second signal.