Back to results
US 2013/0240645 A1Published application
Target supply device
AssigneeGigaphoton Inc.
InventorsTakanobu Ishihara, Toshihiro Nishisaka, Hiroshi Someya, Osamu Wakabayashi
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeGigaphoton Inc.
InventorsTakanobu Ishihara, Toshihiro Nishisaka, Hiroshi Someya, Osamu Wakabayashi
Estimating the term…
A target supply device may include a tank formed cylindrically with a first material, a cylindrical portion for covering the tank, the cylindrical portion being formed of a second material having higher tensile strength than the first material, a first lid formed of the second material and having a through-hole, the first lid being provided at one end in an axial direction of the cylindrical portion, a second lid formed of the second material and provided at another end opposite the one end in the axial direction of the cylindrical portion, and a nozzle provided to be in fluid communication with the interior of the tank and to pass through the through-hole, the nozzle being formed of the first material.
A target supply device, comprising:
Dependencies are inferred from the claim text.