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US 2013/0239885 A1Published application
Film formation mask
AssigneeCanon Kabushiki Kaisha
InventorTetsuya KARAKI
Life of this patent
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Abstract
Provided is a film formation mask capable of preventing slit-like openings from being closed by vibrations so as to form a highly precise patterned film with stability. In a film formation mask formed by providing multiple slit-like openings in a metal foil, the shape of the opening of at least one end of the slit-like openings is asymmetrical with respect to a center line of the width direction of the slit-like openings.
Claims3
A film formation mask, comprising a metal foil fixed to a frame body with stronger tension applied to the metal foil in one direction than in another direction, wherein:
- the metal foil includes slit-like openings elongated in the one direction, which are repeatedly provided in a short side direction of the slit-like openings;
- and
- a shape of at least one end of each of the slit-like openings is asymmetrical with respect to a center line of a short side of the slit-like openings.
(canceled)
Dependencies are inferred from the claim text.